Nordson MARCH FlexTRAK-SHS High-Capacity Plasma Treatment System Delivers Advanced Automation and Manufacturing Flexibility

Nordson MARCH, a subsidiary of Nordson, a leading firm in plasma processing technology, has announced the FlexTRAK®- SHS automatic plasma processing system. Plasma system includes a large-volume F3-S process chamber of 9.6 liters (585 square inches) that can be configured for larger webs or process more webs per cycle, providing higher throughput and increased efficiency for semiconductor and electronics packaging. The advanced automation of the FlexTRAK-SHS system enables high-efficiency processing of lead frames, high-density substrates and other web-type electronic components. The system performs simultaneous web buffering and plasma processing for higher chamber utilization. Advanced process controls, interchangeable electrode configurations and plasma modes provide application flexibility. The FlexTRAK-SHS plasma chamber uses the same architecture and technology as smaller FlexTRAK platforms for seamless transition as production requires greater capacity. It can perform surface cleaning, oxide removal, organic contamination removal and surface activation. FlexTRAK-SHS is CE-approved and complies with SEMI S2 / S8 (EH and S / Ergonomics) standards.

Key applications for plasma cleaning:

• Pre-wire bond plasma processing on semiconductor package surfaces and lead frames. • Pre-fill plasma processing on flip-chip packages. • Pre-mold plasma processing on semiconductor package surfaces and lead frames. • Plasma processing on semiconductor package substrates and lead frames for better adhesion. • Oxide removal / reduction on lead frames. Daniel Chir, Product Manager at Nordson MARCH, said "FlexTRAK-SHS is the latest product in Nordson MARCH's TRAK® series of automatic plasma systems. It is designed to meet the needs our customers are experiencing as they develop new processes to increase their performance and productivity" and added "Based on MARCH's patented plasma technology, FlexTRAK-SHS is our most advanced automatic plasma system, delivering the same unique treatment integrity and process consistency as our other unique TRAK series plasma systems while taking productivity to new levels."